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钛酸锶晶体（SrTiO3） wafer

25.4mm 50.8mm

intrinsic

<100><111>

hexagonal tetragonal

300

10.4×10 -6/℃

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

钛酸锶晶体（SrTiO3） wafer

25.4mm 50.8mm

铌(Nb)

<100><111>

hexagonal tetragonal

300

10.4×10 -6/℃

0.0035 - 0.08ohm-cm

1% - 0.1%

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

钛酸锶晶体（SrTiO3） wafer

25.4mm 50.8mm

钕(Nd)

<100><111>

hexagonal tetragonal

300

10.4×10 -6/℃

0.0035 - 0.08ohm-cm

1% - 0.1%

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

钛酸锶晶体（SrTiO3） wafer

25.4mm 50.8mm

Fe

<100><111>

hexagonal tetragonal

300

10.4×10 -6/℃

0.0035 - 0.08ohm-cm

1% - 0.1%

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

铝酸镧（LaAlO3）wafer

25.4mm 50.8mm

intrinsic/Mg/Fe

<100><111>

hexagona tetragonal

21

9.4x10-6

0.9 - 9 *E11 ohm-cm

1.0*E11 - 9.9 *E19 ohm-cm

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um

钛酸锶（SrTiO3）铝酸镧（LaAlO3） wafer

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Specification for 钛酸锶（SrTiO3）铝酸镧（LaAlO3） wafer


Grade	Dimeter	Type/dopant	Orientaion	crystal struction	dielectric constant	coefficient of thermal expansion	Resistivity	dopant element concentration	Flat	Surface/Roughness	Geometric parameter
钛酸锶晶体（SrTiO3） wafer	25.4mm 50.8mm	intrinsic	<100><111>	hexagonal tetragonal	300	10.4×10 -6/℃			N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
钛酸锶晶体（SrTiO3） wafer	25.4mm 50.8mm	铌(Nb)	<100><111>	hexagonal tetragonal	300	10.4×10 -6/℃	0.0035 - 0.08ohm-cm	1% - 0.1%	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
钛酸锶晶体（SrTiO3） wafer	25.4mm 50.8mm	钕(Nd)	<100><111>	hexagonal tetragonal	300	10.4×10 -6/℃	0.0035 - 0.08ohm-cm	1% - 0.1%	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
钛酸锶晶体（SrTiO3） wafer	25.4mm 50.8mm	Fe	<100><111>	hexagonal tetragonal	300	10.4×10 -6/℃	0.0035 - 0.08ohm-cm	1% - 0.1%	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um
铝酸镧（LaAlO3）wafer	25.4mm 50.8mm	intrinsic/Mg/Fe	<100><111>	hexagona tetragonal	21	9.4x10-6	0.9 - 9 *E11 ohm-cm	1.0E11 - 9.9 E19 ohm-cm	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 10um Warp < 20um